\u5728\u8ffd\u6c42\u6781\u81f4\u4e00\u81f4\u6027\u7684\u8fc7\u7a0b\u4e2d\uff0c\u4e00\u4e2a \u7a84\u7ebf\u5bbd\u6fc0\u5149\u4e8c\u6781\u7ba1<\/strong> \u662f\u7531 Schawlow-Townes \u5b9a\u7406\u51b3\u5b9a\u7684\uff0c\u8be5\u5b9a\u7406\u5c06\u5149\u8c31\u5bbd\u5ea6\u4e0e\u5149\u8154\u5185\u7684\u5149\u5b50\u5bc6\u5ea6\u53ca \u81ea\u53d1\u6392\u653e\u7387<\/strong>. .\u5bf9\u4e8e\u6807\u51c6\u6cd5\u5e03\u91cc-\u4f69\u7f57\uff08FP\uff09\u6fc0\u5149\u5668\u6765\u8bf4\uff0c\u7ebf\u5bbd\u901a\u5e38\u5728\u51e0\u767e\u5343\u5146\u8d6b\u7684\u8303\u56f4\u5185\u3002\u7136\u800c\uff0c\u5bf9\u4e8e\u5e72\u6d89\u6d4b\u91cf\u6216\u9ad8\u5206\u8fa8\u7387\u5149\u8c31\u5b66\u7b49\u5e94\u7528\uff0c\u5fc5\u987b\u5c06\u7ebf\u5bbd\u6291\u5236\u51e0\u4e2a\u6570\u91cf\u7ea7\u3002.<\/p>\n\n\n\n \u8981\u5b9e\u73b0\u4e9a\u5146\u8d6b\u5179\u7ebf\u5bbd\uff0c\u9700\u8981\u5728\u7ed3\u6784\u4e0a\u6446\u8131\u7b80\u5355\u7684\u534a\u5bfc\u4f53\u7ed3\u3002\u7269\u7406\u5b66\u56f4\u7ed5\u7740\u63d0\u9ad8\u8c10\u632f\u5668\u5185\u7684\u5149\u5b50\u5bff\u547d\uff08$\\tau_p$\uff09\u5c55\u5f00\u3002\u8981\u505a\u5230\u8fd9\u4e00\u70b9\uff0c\u5c31\u5fc5\u987b\u5c06\u7a7a\u8154\u6269\u5c55\u5230\u534a\u5bfc\u4f53\u82af\u7247\u672c\u8eab\u4e4b\u5916\uff0c\u5f62\u6210\u4e00\u4e2a \u5916\u8154 \u4e8c\u6781\u7ba1\u6fc0\u5149\u5668<\/a> (ECDL)<\/strong> \u914d\u7f6e\u3002\u901a\u8fc7\u5f15\u5165\u9891\u7387\u9009\u62e9\u5143\u4ef6\uff08\u5982\u4f53\u5e03\u62c9\u683c\u5149\u6805\uff08VBG\uff09\u6216\u884d\u5c04\u5149\u6805\uff09\uff0c\u5236\u9020\u5546\u53ef\u4ee5\u8feb\u4f7f\u6fc0\u5149\u5668\u5728\u5355\u4e00\u7eb5\u5411\u6a21\u5f0f\u4e0a\u632f\u8361\u3002\u8fd9\u79cd\u9891\u7387\u9009\u62e9\u7684\u7cbe\u786e\u6027\u51b3\u5b9a\u4e86\u6fc0\u5149\u4ece\u666e\u901a\u5149\u6e90\u5230\u79d1\u5b66\u7ea7\u4eea\u5668\u7684\u8f6c\u53d8\u3002.<\/p>\n\n\n\n \u5de5\u7a0b\u8bbe\u8ba1 638nm \u6fc0\u5149\u4e8c\u6781\u7ba1<\/a><\/strong> \u4ee5\u53ca\u4e00\u4e2a 785nm \u6fc0\u5149\u4e8c\u6781\u7ba1<\/strong> \u5728 638nm \u6ce2\u957f\u4e0b\uff0cAlGaInP \u6750\u6599\u7cfb\u7edf\u53d7\u5230\u8f7d\u6d41\u5b50\u7ea6\u675f\u4f4e\u7684\u56f0\u6270\u3002\u5728 638nm \u6ce2\u957f\u5904\uff0cAlGaInP \u6750\u6599\u7cfb\u7edf\u53d7\u5230\u8f7d\u6d41\u5b50\u7ea6\u675f\u4f4e\u7684\u56f0\u6270\u3002\u7531\u4e8e\u91cf\u5b50\u9631\u548c p \u578b\u5305\u5c42\u4e4b\u95f4\u7684\u5e26\u504f\u79fb\u76f8\u5bf9\u8f83\u5c0f\uff0c\u968f\u7740\u6e29\u5ea6\u7684\u5347\u9ad8\uff0c\u7535\u5b50\u5f88\u5bb9\u6613\u4ece\u6709\u6e90\u533a\u9003\u9038\u3002\u8fd9\u79cd \u201c\u8f7d\u6d41\u5b50\u6ea2\u51fa \u201d\u4f1a\u5bfc\u81f4\u94dd\u9553\u94df\u7852\u6750\u6599\u7cfb\u7edf\u4e2d\u7684\u7535\u5b50\u5bc6\u5ea6\u5927\u5e45\u589e\u52a0\u3002 \u81ea\u53d1\u6392\u653e\u7387<\/strong> \u8d85\u51fa\u6240\u9700\u7684\u6a21\u5f0f\uff0c\u8868\u73b0\u4e3a\u9891\u8c31\u566a\u58f0\u589e\u52a0\u3002.<\/p>\n\n\n\n \u76f8\u6bd4\u4e4b\u4e0b 785nm \u6fc0\u5149\u4e8c\u6781\u7ba1<\/strong>, \u57fa\u4e8e\u7837\u5316\u9553\uff08AlGaAs\uff09\u7684\u9ad8\u589e\u76ca\u8bbe\u5907\u662f\u4e00\u79cd\u9ad8\u589e\u76ca\u8bbe\u5907\uff0c\u4f46\u5176\u523b\u9762\u7684\u8868\u9762\u91cd\u7ec4\u901f\u5ea6\u5f88\u9ad8\u3002\u8fd9\u4f7f\u5176\u5728\u8fbe\u5230\u9ad8\u529f\u7387\u6c34\u5e73\u65f6\u7279\u522b\u5bb9\u6613\u53d1\u751f\u707e\u96be\u6027\u5149\u5b66\u635f\u4f24\uff08COD\uff09\u3002\u4e3a\u4e86\u5b9e\u73b0 \u884d\u5c04\u53d7\u9650\u6fc0\u5149\u5668<\/a><\/strong> \u8981\u5b9e\u73b0 785nm \u6ce2\u957f\u7684\u8f93\u51fa\uff0c\u5916\u5ef6\u7ed3\u6784\u5fc5\u987b\u5305\u62ec \u201c\u68af\u5ea6\u6307\u6570\u5206\u79bb\u7ea6\u675f\u5f02\u8d28\u7ed3\u6784\u201d\uff08GRINSCH\uff09\u3002\u8fd9\u79cd\u8bbe\u8ba1\u53ef\u786e\u4fdd\u5149\u573a\u5782\u76f4\u6269\u6563\uff0c\u964d\u4f4e\u9762\u4e0a\u7684\u5f3a\u5ea6\uff0c\u540c\u65f6\u4fdd\u6301\u4e0e\u589e\u76ca\u4ecb\u8d28\u7684\u9ad8\u5ea6\u91cd\u53e0\u3002\u8fd9\u79cd\u754c\u9762\u7684\u7a33\u5b9a\u6027\u662f\u62c9\u66fc\u5149\u8c31\u7cfb\u7edf\u957f\u671f\u53ef\u9760\u6027\u7684\u4e3b\u8981\u9a71\u52a8\u529b\u3002.<\/p>\n\n\n\n A \u884d\u5c04\u53d7\u9650\u6fc0\u5149\u5668<\/strong> \u7684\u7279\u5f81\u662f $M^2$ \u56e0\u5b50\u63a5\u8fd1 1.0\uff0c\u8fd9\u610f\u5473\u7740\u5149\u675f\u9075\u5faa\u7406\u60f3\u7684\u9ad8\u65af\u4f20\u64ad\u89c4\u5f8b\u3002\u5728 \u534a\u5bfc\u4f53\u6fc0\u5149\u5668<\/a>, \u5149\u675f\u8d28\u91cf\u53d6\u51b3\u4e8e \u201c\u810a\u6ce2\u5bfc\u201d\uff08RWG\uff09\u7684\u51e0\u4f55\u5f62\u72b6\u3002\u810a\u5fc5\u987b\u8db3\u591f\u7a84--\u901a\u5e38\u5728 2.0 $\\mu m$ \u548c 3.5 $\\mu m$ \u4e4b\u95f4--\u4ee5\u786e\u4fdd\u53ea\u6709\u57fa\u672c\u6a2a\u5411\u6a21\u5f0f\u53ef\u4ee5\u632f\u8361\u3002.<\/p>\n\n\n\n \u7136\u800c\uff0c\u5f53\u810a\u7ebf\u5bbd\u5ea6\u51cf\u5c0f\uff0c\u4ee5\u5b9e\u73b0 \u884d\u5c04\u53d7\u9650\u6fc0\u5149\u5668<\/strong> \u914d\u7f6e\u6587\u4ef6 \u70ed\u963b ($R_{th}$)<\/strong> \u589e\u52a0\u3002\u8fd9\u4f1a\u5728\u4ea4\u754c\u5904\u5f62\u6210\u5c40\u90e8 \u201c\u70ed\u5c9b\u201d\u3002\u8fd9\u79cd\u70ed\u91cf\u4f1a\u5bfc\u81f4\u6298\u5c04\u7387\u68af\u5ea6\uff0c\u5373\u6240\u8c13\u7684\u70ed\u900f\u955c\uff0c\u4ece\u800c\u626d\u66f2\u6ce2\u9635\u9762\uff0c\u4f7f\u5149\u675f\u504f\u79bb\u884d\u5c04\u6781\u9650\u3002\u56e0\u6b64\uff0c\u5236\u9020\u5de5\u827a\u5fc5\u987b\u91c7\u7528 \u201c\u4e9a\u5fae\u7c73\u5149\u523b\u6280\u672f\u201d\uff0c\u4ee5\u786e\u4fdd\u810a\u58c1\u5b8c\u5168\u5782\u76f4\u548c\u5149\u6ed1\u3002\u810a\u4fa7\u58c1\u7684\u4efb\u4f55\u7c97\u7cd9\u5ea6\u90fd\u4f1a\u6210\u4e3a\u6563\u5c04\u4e2d\u5fc3\uff0c\u589e\u52a0\u5185\u90e8\u635f\u8017\u5e76\u62d3\u5bbd\u7ebf\u5bbd\u3002.<\/p>\n\n\n\n \u5bf9\u4e8e\u4efb\u4f55\u9ad8\u7cbe\u5ea6\u539f\u59cb\u8bbe\u5907\u5236\u9020\u5546\u5e94\u7528\u800c\u8a00 \u8776\u5f62\u5c01\u88c5\u6fc0\u5149\u4e8c\u6781\u7ba1<\/a><\/strong> \u6210\u4e3a\u884c\u4e1a\u6807\u51c6\u662f\u6709\u539f\u56e0\u7684\u3002\u4e0e TO-can \u5c01\u88c5\u4e0d\u540c\uff0c14 \u5f15\u811a\u8776\u5f62\u6a21\u5757\u65e8\u5728\u5c06\u6fc0\u5149\u82af\u7247\u4e0e\u6df7\u4e71\u7684\u5916\u90e8\u73af\u5883\u9694\u79bb\u5f00\u6765\u3002\u8fd9\u79cd\u9694\u79bb\u7684\u6838\u5fc3\u662f\u96c6\u6210\u4e86\u4e00\u4e2a\u5185\u90e8\u70ed\u7535\u51b7\u5374\u5668 (TEC) \u548c\u4e00\u4e2a\u9ad8\u7075\u654f\u5ea6 NTC \u70ed\u654f\u7535\u963b\u3002.<\/p>\n\n\n\n \u8be5 \u70ed\u963b ($R_{th}$)<\/strong> \u7684\u6700\u5173\u952e\u53c2\u6570\u3002 \u8776\u5f62\u5c01\u88c5\u6fc0\u5149\u4e8c\u6781\u7ba1<\/strong>. .\u901a\u8fc7\u5c06\u6fc0\u5149\u82af\u7247\u5b89\u88c5\u5728\u6c2e\u5316\u94dd (AlN) \u5e95\u5ea7\u4e0a\uff08\u6c2e\u5316\u94dd\u5177\u6709\u9ad8\u5bfc\u70ed\u6027\uff0c\u70ed\u81a8\u80c0\u7cfb\u6570 (CTE) \u4e0e\u6fc0\u5149\u82af\u7247\u76f8\u5339\u914d\uff09\uff0c\u5236\u9020\u5546\u53ef\u4ee5\u6709\u6548\u5730\u5c06\u70ed\u91cf\u4ece\u6709\u6e90\u533a \u201c\u6392\u51fa\u201d\u3002.<\/p>\n\n\n\n \u6b64\u5916\uff0c\u8776\u5f62\u8f6f\u4ef6\u5305\u8fd8\u53ef\u4ee5\u96c6\u6210\u6c38\u4e45\u6027\u7684 \u5916\u8154\u4e8c\u6781\u7ba1\u6fc0\u5149\u5668\uff08ECDL\uff09<\/strong> \u4f7f\u7528 VBG \u8bbe\u7f6e\u3002\u8be5\u5149\u6805\u4f4d\u4e8e\u6c14\u5bc6\u5c01\u88c5\u5185\uff0c\u8ddd\u79bb\u6fc0\u5149\u9762\u4ec5\u51e0\u5fae\u7c73\u3002\u7531\u4e8e VBG \u4e0e\u6fc0\u5149\u82af\u7247\u70ed\u9501\u5b9a\u5728\u540c\u4e00 TEC \u4e0a\uff0c\u56e0\u6b64\u6574\u4e2a\u5149\u8c31\u8f93\u51fa\u4e0d\u53d7\u73af\u5883\u6e29\u5ea6\u6ce2\u52a8\u7684\u5f71\u54cd\u3002\u8fd9\u79cd\u96c6\u6210\u5ea6\u4f7f 785nm \u6fc0\u5149\u4e8c\u6781\u7ba1<\/strong> \u5728\u6570\u5343\u5c0f\u65f6\u7684\u8fd0\u884c\u8fc7\u7a0b\u4e2d\uff0c\u9891\u7387\u4fdd\u6301\u5728 0.005 \u7eb3\u7c73\u4ee5\u5185\u3002.<\/p>\n\n\n\n \u4e0b\u8868\u603b\u7ed3\u4e86\u7ea2\u5149\u548c\u8fd1\u7ea2\u5916\u4e8c\u6781\u7ba1\u5404\u79cd\u5c01\u88c5\u548c\u7a33\u5b9a\u7b56\u7565\u4e4b\u95f4\u7684\u6027\u80fd\u5dee\u5f02\u3002\u8be5\u6570\u636e\u5f3a\u8c03\u4e86\u5f71\u54cd \u201c\u7cfb\u7edf\u603b\u6210\u672c \u201d\u7684 \u201c\u5143\u4ef6\u8d28\u91cf \u201d\u6307\u6807\u3002\u201d<\/p>\n\n\n\n \u5ba2\u6237\u80cc\u666f\uff1a<\/p>\n\n\n\n \u4e00\u5bb6\u9886\u5148\u7684\u5149\u523b\u68c0\u6d4b\u5de5\u5177\u5236\u9020\u5546\u9700\u8981\u4e00\u4e2a\u9ad8\u5ea6\u7a33\u5b9a\u7684 638nm \u6fc0\u5149\u4e8c\u6781\u7ba1\uff0c\u7528\u4e8e\u4f4d\u79fb\u6d4b\u91cf\u5e72\u6d89\u4eea\u3002\u8be5\u7cfb\u7edf\u9700\u8981\u4ee5 0.5 \u7eb3\u7c73\u7684\u5206\u8fa8\u7387\u6d4b\u91cf\u6676\u5706\u5e73\u53f0\u7684\u4f4d\u7f6e\u3002.<\/p>\n\n\n\n \u6280\u672f\u6311\u6218\uff1a<\/p>\n\n\n\n \u5ba2\u6237\u4e4b\u524d\u4f7f\u7528\u7684 638nm \u5149\u6e90\u5177\u6709\u5f88\u9ad8\u7684 \u201c\u76f8\u4f4d\u566a\u58f0\u201d\uff0c\u5bfc\u81f4\u8ddd\u79bb\u6d4b\u91cf\u51fa\u73b0\u6296\u52a8\u3002\u6b64\u5916\uff0c\u5149\u675f\u5e76\u4e0d\u5b8c\u5168\u53d7\u884d\u5c04\u9650\u5236\uff0c\u5f53\u5149\u675f\u7a7f\u8fc7\u957f\u8def\u5f84\u5e72\u6d89\u4eea\u81c2\u65f6\uff0c\u4f1a\u5bfc\u81f4\u6ce2\u524d\u7578\u53d8\u3002\u8fd9\u5c31\u9700\u8981\u7ecf\u5e38\u91cd\u65b0\u6821\u51c6\u6574\u4e2a\u6d4b\u91cf\u5de5\u5177\uff0c\u5bfc\u81f4\u6700\u7ec8\u7528\u6237\u82b1\u8d39\u6570\u5343\u7f8e\u5143\u7684\u505c\u673a\u65f6\u95f4\u3002.<\/p>\n\n\n\n \u6280\u672f\u53c2\u6570\u548c\u8bbe\u7f6e<\/strong><\/p>\n\n\n\n \u8d28\u91cf\u63a7\u5236\u548c\u5de5\u7a0b\u89e3\u51b3\u65b9\u6848\uff1a<\/p>\n\n\n\n\u6750\u6599\u52a8\u6001\uff1a638 \u7eb3\u7c73 AlGaInP \u5bf9 785 \u7eb3\u7c73 AlGaAs<\/h3>\n\n\n\n
\u5b9e\u73b0\u884d\u5c04\u6781\u9650\uff1a\u6ce2\u5bfc\u51e0\u4f55\u7684\u4f5c\u7528<\/h3>\n\n\n\n
\u8774\u8776\u5305\u88c5\uff1a\u70ed\u7a33\u5b9a\u6027\u548c\u673a\u68b0\u7a33\u5b9a\u6027\u7684\u5723\u5730<\/h3>\n\n\n\n
\u6570\u636e\u5206\u6790\uff1a\u8f6f\u4ef6\u5305\u67b6\u6784\u548c\u5149\u8c31\u6027\u80fd<\/h3>\n\n\n\n
\u53c2\u6570<\/strong><\/td> 638nm FP\uff08TO-Can\uff09<\/strong><\/td> 638nm VBG\uff08\u8776\u5f62\uff09<\/strong><\/td> 785nm FP\uff08TO-Can\uff09<\/strong><\/td> 785nm VBG\uff08\u8776\u5f62\uff09<\/strong><\/td><\/tr><\/thead> \u7ebf\u5bbd\uff08FWHM\uff09<\/strong><\/td> ~2.0 \u7eb3\u7c73<\/td> < 0.1 \u7eb3\u7c73<\/td> ~1.5 \u7eb3\u7c73<\/td> < 0.05 \u7eb3\u7c73<\/td><\/tr> SMSR (dB)<\/strong><\/td> \u4e0d\u9002\u7528<\/td> > 40<\/td> \u4e0d\u9002\u7528<\/td> > 45<\/td><\/tr> \u5149\u675f\u8d28\u91cf\uff08$M^2$\uff09<\/strong><\/td> 1.3 – 1.5<\/td> < 1.1<\/td> 1.2 – 1.4<\/td> < 1.1<\/td><\/tr> $R_{th}$ (K\/W)<\/strong><\/td> 25 – 40<\/td> 2 – 5<\/td> 15 – 30<\/td> 1 – 3<\/td><\/tr> \u6ce2\u957f\u6f02\u79fb<\/strong><\/td> 0.2 nm\/K<\/td> < 0.01 nm\/K<\/td> 0.3 nm\/K<\/td> < 0.007 nm\/K<\/td><\/tr> \u6307\u5411\u7a33\u5b9a\u6027<\/strong><\/td> \u8d2b\u7a77<\/td> < 5 $\\mu rad\/K$<\/td> \u4e2d\u5ea6<\/td> < 5 $\\mu rad\/K$<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n \u6848\u4f8b\u7814\u7a76\uff1a\u7528\u4e8e\u534a\u5bfc\u4f53\u8ba1\u91cf\u7684\u4e9a\u7eb3\u7c73\u5e72\u6d89\u6d4b\u91cf\u6cd5<\/h3>\n\n\n\n
\n